JPH0174276U - - Google Patents
Info
- Publication number
- JPH0174276U JPH0174276U JP1987167521U JP16752187U JPH0174276U JP H0174276 U JPH0174276 U JP H0174276U JP 1987167521 U JP1987167521 U JP 1987167521U JP 16752187 U JP16752187 U JP 16752187U JP H0174276 U JPH0174276 U JP H0174276U
- Authority
- JP
- Japan
- Prior art keywords
- molecular beam
- grows
- crystals
- chamber
- crystal growth
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 4
- 230000008020 evaporation Effects 0.000 claims description 2
- 238000001704 evaporation Methods 0.000 claims description 2
- 239000013078 crystal Substances 0.000 claims 4
- 239000000155 melt Substances 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987167521U JPH0174276U (en]) | 1987-10-31 | 1987-10-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987167521U JPH0174276U (en]) | 1987-10-31 | 1987-10-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0174276U true JPH0174276U (en]) | 1989-05-19 |
Family
ID=31455894
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987167521U Pending JPH0174276U (en]) | 1987-10-31 | 1987-10-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0174276U (en]) |
-
1987
- 1987-10-31 JP JP1987167521U patent/JPH0174276U/ja active Pending
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